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Optical Fiber Interferometer Based on Inner Air-Cavity With an Open Channel for Gas Pressure Sensing
IEEE Photonics Technology Letters  (IF2.468),  Pub Date : 2021-09-22, DOI: 10.1109/lpt.2021.3114336
Yunpeng Ge, D. N. Wang

An optical fiber Mach-Zehnder interferometer based on an inner air-cavity with an open micro-channel structure is presented. The device is fabricated by using femtosecond laser to inscribe a cavity structure in the optical fiber core, followed by discharging the cavity area with a fusion splicer to form an inner air-cavity in the fiber core, and finally create an open micro-channel with the help of hydrofluoric acid corrosion. The fiber in-line interferometric device is miniature, robust, and stable in operation and exhibits a high pressure sensitivity of ~3351 pm/MPa, with an extremely low temperature cross-sensitivity of 2.58 kPa/°C.