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Fabrication and characteristics of VOx microbolometer integrated into gold black absorbing layer
Ferroelectrics  (IF0.62),  Pub Date : 2021-08-15, DOI: 10.1080/00150193.2021.1903269


Abstract

Using vanadium oxide (VOx) thin film as active layer, microbolometer with gold black absorber was fabricated due to the high mid-infrared (8-14μm) absorption property of gold black. This paper describes the design and fabrication of microbolometer with micromachining surface technology. The characteristics of the device are investigated. The detector performance exhibits maximum detectivity of 1.96 × 108cmHz1/2/W at 17 Hz with 8.8μA.